Advances in photolithography and other
micro-processing techniques over the
past
twenty years have enabled the development of micro-scale integrated
mechanical and electrical systems. These microelectromechanical
systems (MEMS) are usually fabricated using planar processing
methods which complicates the design of devices capable of motion
out from the plane of fabrication. Precise spatial motion control of
micro-mirrors and optical filters is needed to enable further
progress in adaptive optics and optical networking applications.
When these applications call for a micro mechanism that rotates out
of the plane of fabrication with an in-plane rotational input, or
that rotates spatially about a point, spherical kinematics may
represent an appropriate solution.
A MEMS device,
which combines a spherical mechanism and a planar bistable
mechanism, is shown in its stable out-of-plane configuration.
past
twenty years have enabled the development of micro-scale integrated
mechanical and electrical systems. These microelectromechanical
systems (MEMS) are usually fabricated using planar processing
methods which complicates the design of devices capable of motion
out from the plane of fabrication. Precise spatial motion control of
micro-mirrors and optical filters is needed to enable further
progress in adaptive optics and optical networking applications.
When these applications call for a micro mechanism that rotates out
of the plane of fabrication with an in-plane rotational input, or
that rotates spatially about a point, spherical kinematics may
represent an appropriate solution.