Design of MEMS for Out-of-Plane Motion

Advances in photolithography and other micro-processing techniques over the past twenty years have enabled the development of micro-scale integrated mechanical and electrical systems. These microelectromechanical systems (MEMS) are usually fabricated using planar processing methods which complicates the design of devices capable of motion out from the plane of fabrication. Precise spatial motion control of micro-mirrors and optical filters is needed to enable further progress in adaptive optics and optical networking applications. When these applications call for a micro mechanism that rotates out of the plane of fabrication with an in-plane rotational input, or that rotates spatially about a point, spherical kinematics may represent an appropriate solution.

    A MEMS device, which combines a spherical mechanism and a planar bistable mechanism, is shown in its stable out-of-plane configuration.

Principal Investigator: Craig Lusk

The Mission of the Department of Mechanical Engineering in the College of Engineering at the University of South Florida is to provide a quality undergraduate and graduate education for students entering the mechanical engineering profession or seeking careers in related fields; to advance scientific knowledge through basic and applied research; to disseminate technical information through scholarly publication, conferences and continuing education; to advance the profession through service within the associated societies and; to promote activities which serve global development.