Kumar's Review Article published

in

Prestigious Material Science and Engineering-R Reports

 

A comprehensive review article on the semiconductor fabrication process of Chemical Mechanical Polishing (CMP) authored by Parshuram B. Zantye, Ashok Kumar and Arun Sikder and titled “Chemical Mechanical Planarization for Microelectronics Materials,”  has been recently published in prestigious Material Science and Engineering Journal ‘Material Science and Engineering-R Reports. The article feature in volume 45, Issue 3-6 and is published on October 15, 2004. The elaborate 132 printed page article explains the process of CMP right from its fundamentals and go on elucidate different methods and mechanisms involved there in. The review is done from a materials engineering perspective and describes the impact of the process on various materials in detail.

           

Materials Science & Engineering R: Reports publishes invited review papers covering the full spectrum of materials science and engineering. The reviews, both experimental and theoretical, provide general background information as well as a critical assessment on topics in a state of flux. The editorial policy of Materials Science & Engineering R: Reports is to serve its readership in two ways. Firstly, it provides a critical overview of the current issues in a well-defined area of immediate interest to materials scientists. Secondly, each review contains an extensive list of references thus providing an invaluable pointer to the primary research literature available on the topic. This policy is implemented by the Editorial Board which consists of outstanding scientists in their respective disciplines. The Board identifies the topics of interest and subsequently invites qualified authors. In order to ensure speedy publication, each review is published separately. The target audience is Materials Scientists, Solid-State Physicists and Chemists, and Mechanical and Electrical Engineers. The Materials Science and Engineering-R Reports journal has a very high impact factor of 10.032 (impact factor of ‘Nature’ journal is 30.979) and is ranked one of the top 100 journals in world (all disciplines included).